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Cambridge cf4 Density Monitors

Cambridge cf4 Density Monitors

Lead-Zirconate-Titanate (PZT) films were etched with CF 4 /Ar mixed gases in high-density plasmas. Etch characteristics of the PZT film were investigated by using in-situ plasma diagnostic tools in conjunction with the surface analysis after etching. Densities of ionic species such as F + and CF x + (x=1∼3) and their ion energy distributions within the plasma were measured by a mass ...Author: Chanro Park, Jun Hee Cho, Chang Ju Choi, Yeo Song Seol, Il Hyun ChoiPublish Year: 1998Carbon tetrafluoride | CF4 - PubChem

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