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Cambridge sf6 o2 Transmitter

Cambridge sf6 o2 Transmitter

Feb 28, 2011Etch rates of Kapton H polyimide film in SF 6 - O 2 plasmas (0.25 torr) were studied as a function of the input gas mixture, the excitation frequency (25 kHz -450 kHz; 13.56 MHz) and the biasing mode.The treated surface was examined by X P S, SEM and contact angle measurement.. The ion and neutral species of the plasma were sampled and analyzed by mass spectrometry.A proposed kinetic …Cited by: 2Publish Year: 1986Author: M. Kogoma, G. TurbanTGas-1013 Wallmount SF6 Infrared Gas Transmitter – SF6China

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