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[email protected]In this work, we carried out the study of CF4 + O2 + X (X = C4F8 or CF2Br2) gas chemistries in respect to the SiOxNy reactive-ion etching process in a low power regime. The interest in the liquid CF2Br2 as an additive component is motivated by its generally unknown plasma etching performance. The combination of various diagnostic tools (double Langmuir probe, quadrupole mass-spectrometry, X ...2 Bar MAP sensor question - forum.hptuners.com
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Get PriceSulfur hexafluoride is inert in the troposphere and stratosphere and is extremely long-lived, with an estimated atmospheric lifetime of 800–3,200 years. Measurements of SF 6 show that its global average mixing ratio has reached over 10 parts per trillion (ppt) as of April 2020, and is increasing by about 0.35 ppt (3.5 percent) per year.[PDF]6. ANALYTICAL METHODS
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